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"Hybrid mask lithography for fabrication of micro-pattern with nano-pillars."

Shinya Sakuma, Masakuni Sugita, Fumihito Arai (2012)

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DOI: 10.1109/NEMS.2012.6196721

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  dblp key:
  - conf/nems/SakumaSA12
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  - https://dblp.org/rec/conf/nems/SakumaSA12
Shinya Sakuma, Masakuni Sugita, Fumihito Arai:
Hybrid mask lithography for fabrication of micro-pattern with nano-pillars. NEMS 2012: 53-56

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