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"Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in ..."
Jian Wang et al. (2010)
- Jian Wang, Ying Huang, Wengang Wu, Yilong Hao:
Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment. NEMS 2010: 255-258
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