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"Etch-back in DDSOG process by ultrasonic agitation and application to ..."

Lingyun Wang et al. (2009)

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DOI: 10.1109/NEMS.2009.5068548

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
  - conf/nems/WangZLS09
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  persistent URL:
  - https://dblp.org/rec/conf/nems/WangZLS09
Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun:
Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication. NEMS 2009: 156-159

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