"Design and fabrication of the microplasma reactor for maskless scanning ..."

Li Wen et al. (2009)

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DOI: 10.1109/NEMS.2009.5068646

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Li Wen, Qiuping Zhang, Weiwei Xiang, Hai Wang, Jiaru Chu:
Design and fabrication of the microplasma reactor for maskless scanning plasma etching. NEMS 2009: 577-580

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