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"Ohmic Contact Characteristics of Silicon Carbide-based MEMS Devices."
Chen Wu et al. (2021)
- Chen Wu, Xudong Fang, Zhihong Feng, Qiang Kang, Yuanjie Lv, Yuefei Yan, Zhuangde Jiang:
Ohmic Contact Characteristics of Silicon Carbide-based MEMS Devices. NEMS 2021: 334-338
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