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"Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides."

Yu Xin et al. (2016)

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DOI: 10.1109/NEMS.2016.7758311

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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  dblp key:
  - conf/nems/XinPPMF16
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  - https://dblp.org/rec/conf/nems/XinPPMF16
Yu Xin, Gregory Pandraud, Lukasz S. Pakula, Bruno Morana, Paddy J. French:
Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides. NEMS 2016: 549-552

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