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"A SOI sandwich differential capacitance accelerometer with low-stress package."

Yangxi Zhang et al. (2014)

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DOI: 10.1109/NEMS.2014.6908822

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Yangxi Zhang, Chengchen Gao, Fanrui Meng, Yilong Hao:
A SOI sandwich differential capacitance accelerometer with low-stress package. NEMS 2014: 341-345

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