"Modeling and Simulation of MEMS Capacitive Displacement Sensors."

Mehadi Hasan Ziko, M. Siraj Ghouri, Ants Koel (2020)

> Home

Details and statistics

DOI: 10.1109/NEMS50311.2020.9265618

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/ZikoGK20
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/ZikoGK20
Mehadi Hasan Ziko, M. Siraj Ghouri, Ants Koel:
Modeling and Simulation of MEMS Capacitive Displacement Sensors. NEMS 2020: 171-175

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.