![](https://dblp.org/img/logo.ua.320x120.png)
![](https://dblp.org/img/dropdown.dark.16x16.png)
![](https://dblp.org/img/peace.dark.16x16.png)
Остановите войну!
for scientists:
![search dblp search dblp](https://dblp.org/img/search.dark.16x16.png)
![search dblp](https://dblp.org/img/search.dark.16x16.png)
default search action
"A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated ..."
Sandeep S. Saseendran et al. (2019)
- Sandeep S. Saseendran, Tangla D. Kongnyuy, Bruno Figeys, Federico Buja, Benedetto Troia, Sarp Kerman, Aleksandrs Marinins, Roelof Jansen, Xavier Rottenberg, Deniz Sabuncuoglu Tezcan, Philippe Soussan:
A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation. OFC 2019: 1-3
![](https://dblp.org/img/cog.dark.24x24.png)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.