"Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical ..."

Ju-Nan Kuo, Gwo-Bin Lee, Wen-Fung Pan (2004)

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DOI: 10.1109/ROBIO.2004.1521792

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Ju-Nan Kuo, Gwo-Bin Lee, Wen-Fung Pan:
Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application. ROBIO 2004: 290-295

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