"Design of a parallel kinematic MEMS XY nanopositioner."

Hongliang Shi, Yongsik Kim, Yu She (2015)

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DOI: 10.1109/ROBIO.2015.7419062

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Hongliang Shi, Yongsik Kim, Yu She:
Design of a parallel kinematic MEMS XY nanopositioner. ROBIO 2015: 1973-1978

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