"Design and analysis of a new piezoelectric MEMS tilt sensor."

Paul M. Moubarak, Pinhas Ben-Tzvi (2011)

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DOI: 10.1109/ROSE.2011.6058525

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Paul M. Moubarak, Pinhas Ben-Tzvi:
Design and analysis of a new piezoelectric MEMS tilt sensor. ROSE 2011: 83-88

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