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"Single crystal aluminum nitride film bulk acoustic resonators."

James B. Shealy et al. (2016)

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DOI: 10.1109/RWS.2016.7444351

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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James B. Shealy, Jeffrey B. Shealy, Pinal Patel, Michael D. Hodge, Rama Vetury, James R. Shealy:
Single crystal aluminum nitride film bulk acoustic resonators. RWS 2016: 16-19

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