"A detection method of mura on a coated layer using interference light."

Kazutaka Taniguchi, Kunio Ueta, Shoji Tatsumi (2006)

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DOI: 10.1109/ICSMC.2006.385108

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Kazutaka Taniguchi, Kunio Ueta, Shoji Tatsumi:
A detection method of mura on a coated layer using interference light. SMC 2006: 5047-5052

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