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"Behavioral Modeling of a CMOS Compatible High Precision MEMS Based ..."

T. K. Bhattacharyya, Anandaroop Ghosh (2008)

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DOI: 10.1109/VLSI.2008.60

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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T. K. Bhattacharyya, Anandaroop Ghosh:
Behavioral Modeling of a CMOS Compatible High Precision MEMS Based Electron Tunneling Accelerometer. VLSI Design 2008: 595-600

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