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"Design for Manufacturing in the Semiconductor Industry: The Litho/Design ..."

Franklin M. Schellenberg (1999)

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DOI: 10.1109/ICVD.1999.745134

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/vlsid/Schellenberg99
Franklin M. Schellenberg:
Design for Manufacturing in the Semiconductor Industry: The Litho/Design Workshops. VLSI Design 1999: 111-119

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