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"Extremely High-κ Hf0.2Zr0.8O2 Gate Stacks Integrated into ..."
Yi-Chun Liu et al. (2023)
- Yi-Chun Liu, Yu-Rui Chen
, Yun-Wen Chen, Hsin-Cheng Lin, Wan-Hsuan Hsieh, Chien-Te Tu, Bo-Wei Huang, Wei-Jen Chen, Chun-Yi Cheng, Shee-Jier Chueh, Chee Wee Liu:
Extremely High-κ Hf0.2Zr0.8O2 Gate Stacks Integrated into Ge0.95Si0.05 Nanowire and Nanosheet nFETs Featuring Respective Record Ion per Footprint of 9200μA/μm and Record Ion per Stack of 360μA at VOV=VDS=0.5V. VLSI Technology and Circuits 2023: 1-2
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