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"Pattern Alignment Method Based on Consistency Among Local Registration ..."

Takashi Hiroi, Chie Shishido, Masahiro Watanabe (2002)

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DOI: 10.1109/ACV.2002.1182191

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/wacv/HiroiSW02
Takashi Hiroi, Chie Shishido, Masahiro Watanabe:
Pattern Alignment Method Based on Consistency Among Local Registration Candidates for LSI Wafer Pattern Inspection. WACV 2002: 257-263

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