"Evaluation of cluster tool throughput for thin film head production."

Eric J. Koehler et al. (1999)

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DOI: 10.1109/WSC.1999.823199

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Eric J. Koehler, Timbur M. Wulf, Alvin C. Bruska, Marvin S. Seppanen:
Evaluation of cluster tool throughput for thin film head production. WSC 1999: 714-719

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