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"Development of Decay Based PLS Model and Its Economic Run-to-Run Control ..."

Pengcheng Lu, Junghui Chen, Lei Xie (2018)

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DOI: 10.23919/ACC.2018.8431565

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-08

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Pengcheng Lu, Junghui Chen, Lei Xie:
Development of Decay Based PLS Model and Its Economic Run-to-Run Control for Semiconductor Processes. ACC 2018: 6469-6474

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