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"Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked ..."
Chen Yang et al. (2019)
- Chen Yang, Fangzhou Xia, Yi Wang, Stephen Truncale, Kamal Youcef-Toumi:
Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked Structure. ACC 2019: 3782-3788
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