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"Scheduling of single-arm cluster tools with multi-type wafers and shared PMs."

Jipeng Wang et al. (2017)

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DOI: 10.1109/COASE.2017.8256242

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Jipeng Wang, Chunrong Pan, Hesuan Hu, Yuan Zhou:
Scheduling of single-arm cluster tools with multi-type wafers and shared PMs. CASE 2017: 1046-1051

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