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"Modeling and simulation of a complete semiconductor manufacturing facility ..."

Matthias Becker (2003)

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DOI: 10.1109/ETFA.2003.1248687

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Matthias Becker:
Modeling and simulation of a complete semiconductor manufacturing facility using Petri nets. ETFA (2) 2003: 153-155

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