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"MEMS-IC Optimization Considering Design Parameters and Manufacturing ..."

Florin Burcea et al. (2018)

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DOI: 10.1109/ICECS.2018.8617959

access: closed

type: Conference or Workshop Paper

metadata version: 2022-07-26

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Florin Burcea, Andreas Herrmann, Bing Li, Helmut Graeb:
MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side. ICECS 2018: 625-628

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