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"Impedance matching controller for an inductively coupled plasma chamber - ..."
Giorgio Bacelli, John V. Ringwood, Petar Iordanov (2007)
- Giorgio Bacelli, John V. Ringwood, Petar Iordanov:
Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller. ICINCO-SPSMC 2007: 202-207
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