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"A Vertical Sidewall Surface Piezoresistor Technology Based on DRIE and Its ..."
Jiachou Wang et al. (2008)
- Jiachou Wang, Lining Sun, Weibin Rong, Xinxin Li:
A Vertical Sidewall Surface Piezoresistor Technology Based on DRIE and Its Typical Application in Micro xy-Stages. ICIRA (2) 2008: 170-177
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