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"Manufacturing of Devices for the Parallel Precision Alignment of Multiple ..."

Christian Brecher, Martin Weinzierl (2008)

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DOI: 10.1007/978-0-387-77405-3_29

access: open

type: Conference or Workshop Paper

metadata version: 2018-06-26

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  - conf/ifip5-5/BrecherW08
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  - https://dblp.org/rec/conf/ifip5-5/BrecherW08
Christian Brecher, Martin Weinzierl:
Manufacturing of Devices for the Parallel Precision Alignment of Multiple Micro Components. IPAS 2008: 297-304

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