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"Fabrication and characterization of a novel multi-annular type ..."

Yun-Ju Chuang et al. (2013)

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DOI: 10.1109/NEMS.2013.6559778

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
  - conf/nems/ChuangCLC13
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Yun-Ju Chuang, Pei-Ru Chen, Wei-Rui Lin, Fu-Ron Chen:
Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM. NEMS 2013: 494-497

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