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"Comparative study of the wafer bonding processes for MEMS devices."

Jaehong Park, Sangmin Lee, Dong-Il Cho (2011)

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DOI: 10.1109/NEMS.2011.6017436

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-10

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  - conf/nems/ParkLC11
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Jaehong Park, Sangmin Lee, Dong-Il Cho:
Comparative study of the wafer bonding processes for MEMS devices. NEMS 2011: 638-641

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