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"A virtual metrology method with prediction uncertainty based on Gaussian ..."

Haoshu Cai et al. (2020)

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DOI: 10.1016/J.COMPIND.2020.103228

access: closed

type: Journal Article

metadata version: 2023-09-30

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Haoshu Cai, Jianshe Feng, Qibo Yang, Wenzhe Li, Xiang Li, Jay Lee:
A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization. Comput. Ind. 119: 103228 (2020)

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