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"High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant ..."

Jian Lu et al. (2008)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0805-0933
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0805-0933
Jian Lu, Tsuyoshi Ikehara, Yi Zhang, Takashi Mihara, Toshihiro Itoh, Ryutaro Maeda:
High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection. CoRR abs/0805.0933 (2008)

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