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"Advanced high-k dielectric stacks with polySi and metal gates: Recent ..."

Evgeni P. Gusev, Vijay Narayanan, Martin M. Frank (2006)

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DOI: 10.1147/RD.504.0387

access: closed

type: Journal Article

metadata version: 2023-09-30

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Evgeni P. Gusev, Vijay Narayanan, Martin M. Frank:
Advanced high-k dielectric stacks with polySi and metal gates: Recent progress and current challenges. IBM J. Res. Dev. 50(4-5): 387-410 (2006)

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