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"Investigation of optical and chemical bond properties of hydrogenated ..."

Etienne Herth et al. (2012)

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DOI: 10.1016/J.MICROREL.2011.09.004

access: closed

type: Journal Article

metadata version: 2022-02-04

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Etienne Herth, H. Desré, Emmanuelle Algré, Christiane Legrand, Tuami Lasri:
Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications. Microelectron. Reliab. 52(1): 141-146 (2012)

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