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"Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review ..."

Usama Zaghloul et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.10.008

access: closed

type: Journal Article

metadata version: 2020-10-26

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Usama Zaghloul, George J. Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert Plana:
Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818]. Microelectron. Reliab. 51(12): 2416 (2011)

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