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ORCID"Design, Fabrication and Levitation Experiments of a Micromachined ..."
Feng Cui et al. (2011)
- Feng Cui
, Wu Liu, Wenyuan Chen, Weiping Zhang, Xiaosheng Wu:
Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer. Sensors 11(12): 11206-11234 (2011)
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