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"Modeling and control of an atomic force microscope using a piezoelectric ..."

T.-J. Yeh, Chai-De Wang, Ting-Ying Wu (2008)

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DOI: 10.1016/J.SIMPAT.2008.04.017

access: closed

type: Journal Article

metadata version: 2020-02-24

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T.-J. Yeh, Chai-De Wang, Ting-Ying Wu:
Modeling and control of an atomic force microscope using a piezoelectric tuning fork for force sensing. Simul. Model. Pract. Theory 16(7): 768-782 (2008)

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