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"Guest Editorial Equipment and Operations Automation in the Semiconductor ..."

James R. Morrison et al. (2011)

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DOI: 10.1109/TASE.2010.2078870

access: closed

type: Journal Article

metadata version: 2023-03-03

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James R. Morrison, Chen-Fu Chien, Stéphane Dauzère-Pérès, Milind Dawande, Han Ding, Jeffrey S. Pettinato, Jingang Yi:
Guest Editorial Equipment and Operations Automation in the Semiconductor Industry. IEEE Trans Autom. Sci. Eng. 8(1): 1-4 (2011)

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