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"STOMA: Simultaneous Template Optimization and Mask Assignment for Directed ..."

Jian Kuang, Junjie Ye, Evangeline F. Y. Young (2018)

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DOI: 10.1109/TCAD.2017.2748022

access: closed

type: Journal Article

metadata version: 2020-09-24

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Jian Kuang, Junjie Ye, Evangeline F. Y. Young:
STOMA: Simultaneous Template Optimization and Mask Assignment for Directed Self-Assembly Lithography With Multiple Patterning. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 37(6): 1251-1264 (2018)

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