"Digital Twin-Based Optimization of Operational Parameters for Cluster ..."

Joonick Hwang, Sang do Noh (2024)

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DOI: 10.1109/ACCESS.2024.3450869

access: open

type: Journal Article

metadata version: 2024-09-20

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Joonick Hwang, Sang do Noh:
Digital Twin-Based Optimization of Operational Parameters for Cluster Tools in Semiconductor Manufacturing. IEEE Access 12: 122078-122100 (2024)

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