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"The Level-Set Method for Multi-Material Wet Etching and Non-Planar ..."
Alexander Toifl et al. (2020)
- Alexander Toifl
, Michael Quell
, Xaver Klemenschits
, Paul Manstetten
, Andreas Hössinger
, Siegfried Selberherr
, Josef Weinbub
:
The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy. IEEE Access 8: 115406-115422 (2020)
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