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"A Piezoelectric Stick-Slip Nanopositioning Stage With Ultra-High Load ..."

Yang Yu et al. (2019)

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DOI: 10.1109/ACCESS.2019.2944840

access: open

type: Journal Article

metadata version: 2022-08-11

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Yang Yu, Qiang Gao, Xiaosong Zhang, Guangda Qiao, Yi Han, Xiaohui Lu, Tinghai Cheng:
A Piezoelectric Stick-Slip Nanopositioning Stage With Ultra-High Load Capacity Realizing by Decoupling the Driving and Moving Units. IEEE Access 7: 142806-142813 (2019)

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