"Machine learning in chemical-mechanical planarization: A comprehensive ..."

Georg Winkler et al. (2025)

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DOI: 10.1016/J.AEI.2025.103663

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type: Journal Article

metadata version: 2025-09-06

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Georg Winkler, Tom Rothe, Mudassir Ali Sayyed, Linda Jäckel, Jan Langer, Harald Kuhn, Martin Stoll:
Machine learning in chemical-mechanical planarization: A comprehensive review of trends, applications, and challenges. Adv. Eng. Informatics 68: 103663 (2025)

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