"Solid-based CAPP for surface micromachined MEMS devices."

Jianhua Li, Shuming Gao, Yusheng Liu (2007)

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DOI: 10.1016/J.CAD.2006.08.006

access: closed

type: Journal Article

metadata version: 2025-12-01

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Jianhua Li, Shuming Gao, Yusheng Liu:
Solid-based CAPP for surface micromachined MEMS devices. Comput. Aided Des. 39(3): 190-201 (2007)

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