"Performance modeling, real-time dispatching and simulation of wafer ..."

Huiran Liu, Zhibin Jiang, Richard Y. K. Fung (2009)

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DOI: 10.1016/J.CIE.2008.04.006

access: closed

type: Journal Article

metadata version: 2020-02-20

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Huiran Liu, Zhibin Jiang, Richard Y. K. Fung:
Performance modeling, real-time dispatching and simulation of wafer fabrication systems using timed extended object-oriented Petri nets. Comput. Ind. Eng. 56(1): 121-137 (2009)

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