"A concise subspace projection based meta-learning method for fast modeling ..."

Jingxiang Liu et al. (2024)

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DOI: 10.1016/J.CIE.2024.109914

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type: Journal Article

metadata version: 2024-05-31

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Jingxiang Liu, Weimin Zhu, Guoqing Mu, Chun-I Chen, Junghui Chen:
A concise subspace projection based meta-learning method for fast modeling and monitoring in multi-grade semiconductor process. Comput. Ind. Eng. 188: 109914 (2024)

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