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"Adaptive fault detection framework for recipe transition in semiconductor ..."

Jaewoong Shim et al. (2021)

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DOI: 10.1016/J.CIE.2021.107632

access: closed

type: Journal Article

metadata version: 2021-10-28

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Jaewoong Shim, Sungzoon Cho, Euiseok Kum, Suho Jeong:
Adaptive fault detection framework for recipe transition in semiconductor manufacturing. Comput. Ind. Eng. 161: 107632 (2021)

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