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"Design and modeling of a MEMS accelerometer based on coupled ..."

Ming Lyu et al. (2021)

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DOI: 10.1016/J.CNSNS.2021.105960

access: closed

type: Journal Article

metadata version: 2023-05-03

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Ming Lyu, Jian Zhao, Najib Kacem, Bin Tang, Pengbo Liu, Jiahao Song, Heng Zhong, Yu Huang:
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation. Commun. Nonlinear Sci. Numer. Simul. 103: 105960 (2021)

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