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ORCID"Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic ..."
Nobuhiko P. Kobayashi, R. Stanley Williams (2008)
- Nobuhiko P. Kobayashi, R. Stanley Williams:
Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic Self-assembled Monolayers. Eng. Lett. 16(2): 225-230 (2008)
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