"Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors."

Yadollah Hezarjaribi et al. (2011)

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type: Journal Article

metadata version: 2023-03-16

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Yadollah Hezarjaribi, Mohd Hamidon, Roslina Mohd Sidek, Keshmiri Hossein, Raja Abdullah, Alireza Bahadorimehr:
Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors. Int. Arab J. Inf. Technol. 8(2): 141-146 (2011)

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