"Key measurements of ultrathin gate dielectric reliability and in-line ..."

W. W. (Bill) Abadeer et al. (1999)

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DOI: 10.1147/RD.433.0407

access: closed

type: Journal Article

metadata version: 2023-01-20

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W. W. (Bill) Abadeer, Asmik Bagramian, David W. Conkle, Charles W. Griffin, Eric D. Langlois, Brian F. Lloyd, Raymond P. Mallette, James E. Massucco, Jonathan M. McKenna, Steven W. Mittl, Philip H. Noel:
Key measurements of ultrathin gate dielectric reliability and in-line monitoring. IBM J. Res. Dev. 43(3): 407-416 (1999)

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